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Characterization of Mechanical Properties of Silicon Nitride Thin Films for MEMS Devices by Nanoindentation

H.Huang , X.Z.Hu , Y.Liu , M.Bush , K.Winchester , C.Musca , J.Dell , L.Faraone

材料科学技术(英)

An experimental investigation of mechanical properties of thin films using nanoindentation was reported. Silicon nitride thin films with different thicknesses were deposited using plasma enhanced chemical vapor deposition (PECVD) on Si substrate. Nanoindentation was used to measure their elastic modulus and hardness. The results indicated that for a film/substrate bilayer system, the measured mechanical properties are significantly affected by the substrate properties. Empirical formulas were proposed for deconvoluting the film properties from the measured bilayer properties.

关键词: Mechanical property , null , null , null

Manufacturing and Low-Velocity Impact Response of a New Composite Material: Metal Porous Polymer Composite (MPPC)

X.L.Gong , Y.Liu , S.Y.He , J.Lu

材料科学技术(英)

Three types of metal porous polymer composite (MPPC) were produced by infiltrating different polymers into a porous Al structure. This type of interpenetrating microstructure allows for a better combination of mechanical and physical properties. The low velocity impact response of these composites was investigated by conducting drop-weight impact tests. Impact parameters such as the peak load, the time to peak load, the deflection at peak load, and the absorbed energy were evaluated and compared for Al, MPPC and pure Al foam. The influence of the volume fraction of polymer was also investigated for the above impact parameters. The experimental results indicate that the inlaid polymer has a very important positive effect on the impact behavior and improves the characteristics of the composite in comparison with conventional foam and pure Al.

关键词: MPPC , null , null

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